A Practical Guide to Optical Metrology for Thin Films by Michael Quinten PDF

By Michael Quinten

ISBN-10: 3527411674

ISBN-13: 9783527411672

A one-stop, concise consultant on picking and measuring skinny movie thickness through optical methods.

This sensible booklet covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the idea and perform of thickness size, and sleek purposes. In so doing, it exhibits the services and possibilities of optical thickness selection and discusses the strengths and weaknesses of size units besides their assessment methods.

Following an creation to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in house and subject. the most subject of this e-book, the selection of the thickness of a layer in a layer stack by way of measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. ultimately, in bankruptcy 7, the writer discusses numerous commercial functions of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive movies, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at business and educational researchers, engineers, builders and brands all in favour of all components of optical layer and skinny optical movie dimension and metrology, procedure keep watch over, real-time tracking, and applications.

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A Practical Guide to Optical Metrology for Thin Films by Michael Quinten


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